Kim SungWook was born in Kun-San, Korea, in 1983. He is a Ph.D candidate in the Department of Materials Science and Engineering at the Korea Advanced Institute of Science and Technology (KAIST) where he received Bachelor and Masters Degrees. He is currently working in the Semiconductor Materials Laboratory (SML) supervised by Prof. Kang SangWon. His research subject is applications of atomic layer deposition (ALD) technique on the fabrication process for the memory devices such as dynamic random access memory (DRAM) and flash memory. ALD is a promising technique in the semiconductor process due to its digital thickness controllability, excellent step coverage and superior uniformity. He is now interested in the designation of tunnel barriers in flash memories to improve their operational speed and reliability.
mrwoo11@kaist.ac.kr
Sunday, 27 April 2008
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